Metrology Laboratory. Three
TriOptics FISBA µPhase phase shifting interferometers for optical surface form
measurement. Zygo NewView 5000 & Zygo Zegage Plus white light phase
shifting interferometers for surface roughness measurement to nanometer
accuracy. Zygo Verifire vibration tolerant Fizeau interferometer. TriOptics
Shack Hartmann wavefront sensor. Taylor Hobson Talysurf CLA non-contact
confocal surface profiler. Taylor Hobson
Talysurf PGI contact surface profiler. Keyence VHX6000 digital microscope.
Keyence IM7010 Measurement Head. Mitutoyo coordinate measuring machine. FARO
coordinate measuring arm.
