Leybold thermal vacuum chamber
20 Mar 2018
Yes
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The TVAC chamber can be configured either as a conventional thermal-vacuum chamber or as a low energy electron calibration chamber, the latter configuration being normally for sole use by MSSL.

No

​MSSL TVAC c​hamber​

 

The TVAC chamber can be configured either as a conventional thermal-vacuum chamber or as a low energy electron calibration chamber, the latter configuration being normally for sole use by MSSL. The 1m Leybold TVAC chamber is pumped by a combination of a rotary pump, turbo-pump and a heli​​um cryo-pump. The chamber houses a grounded mu-metal shroud, enclosed at both ends when being used as an electron calibration facility. This ensures that the residual magnetic field inside the chamber is less than one tenth of the Earth’s magnetic field, producing an electron beam divergence of less than 1o at 1keV. The mu-metal shroud is 0.7m long, 0.6m wide and 0.6m in height. 

  • Dimensions: 1m diameter by 1.1m long 
  • Electron beam diameter: 110 mm 
  • Electron beam energies: 30 eV to 20 keV 
  • Base vacuum pressure: 5 x 10-6 mBar 
  • Temperature range (shroud): -40oC to +80oC 
  • Temperature range (platen): -140oC to +100oC 
  • Temperature control: Closed loop PID control, +0.5oC -0.5oC 
  • Temperature measurement: 4 wire 1/10 DIN PT100 sensors, 8 sensors total 
  • Temperature/pressure logging: 8 channel plus pressure logging, user set logging interval
  • ​Electrical feedthroughs: Various D-​​Sub connectors and high voltage connectors​


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